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RF Plasma Generators-Cesar
Features
Compact, streamlined design and standard platform packaging for easy replacement
High efficiency — less heat generated
RS-232, Ethernet, and Profibus communication
Active front panel with convenient, comprehensive operating menu
CEX (phase synch) operation mode
Description
The proven Cesar® platform delivers consistent RF power, withstanding the harshest conditions in plasma processes. The platform expertly handles high-load mismatches and remains fully functional at rated-reflected power. Cesar RF generators boast highly intuitive operating menus — accessible on large, front panel LCDs — that increase efficiency and minimize training costs.

Available in a diverse selection of models (2, 4, 13.56, 27.12, and 40.68 MHz; 0.3 to 5 kW) and equipped with high-quality components, Cesar RF generators maximize reliability and productivity.
Applications
Etch
Deposition
Semiconductor Manufacturing
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